Developer Regeneration System (DRS)
Technology

We have secured domestically developed developer recycle system technology.
This system recovers waste developer used in the photolithography process, concentrates and separates the photoresist
components using a polymer membrane, and then regenerates the purified developer to resupply it to the developer.

DRS(Developer Recycle System)

We possess developer recycle system technology used in the photolithography process.
We developed Korea's first photoacrylic developer recycle system for OLED manufacturing, and hold a patent (No. 10-1266956).

Core features

  • Developer regeneration rate

    90% (10% drained during flow monitoring downstream of the Recycle Filter) High recovery rate compared to competitors (competitor regeneration rate: 80%)

  • PR removal rate

    75±5%(2000ppm~500ppm)