Combo (ACQC +Supply) System (compound type)

A complex system that stores high-purity chemicals used in semiconductors and displays from Tank Lorry to Storage Tank and safely supplies production equipment to production equipment without contamination
Technology Overview and Features

- Dual Module configuration enables high flow (350 RPM) storage and supply and full auto supply
- ACQC and Supply capabilities are complex systems that help reduce costs and utilize space
- PLC and Touch control, automatic control function